随着材料技术的发展，先进陶瓷以其良好的性能广泛应用于航空航天、半导体等领域。但很多陶瓷产品在应用中往往会涉及微孔加工，比如在电子封装领域，需要有微孔来满足芯片导电和引脚固定的封装要求，并实现元件高度集成和散热功能要求，陶瓷基板表面微孔和簇阵列的打孔质量至关重要。陶瓷钻孔然而，先进陶瓷等先进陶瓷的精密...

电力电子器件越来越广泛地应用于蓄电、输电、电动汽车、电力机车等众多工业领域。随着电力电子器件本身的不断高功率、高集成度，芯片在工作过程中会产生大量的热量。如果热量不能及时有效地散发，将会影响电力电子装置的工作性能，严重时还会损坏电力电子装置本身。这就要求具有绝缘散热功能的陶瓷基板必须具有优良的机械性...

Abstract Aluminum nitride (AlN) is a material of great interest for near future applications including high performance power electronics, extreme environment semiconductor devices, radio frequency (RF) devices, and deep ultraviolet (DUV) optoelectronics due to its excellent electrical, optical and...

Diodes and transistors with AlN channels deliver high breakdown voltages and operation at incredibly high temperatures. A NUMBER OF human activities are expanding into extreme environments, often motivated by resource exploitation. This has taken exploration in various directions, including deep un...